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Nucleation of Dislocations from Scratches on the Surface of PVT-Grown 4H-SiC Wafers

Crossref DOI link: https://doi.org/10.1007/s11664-025-11743-8

Published Online: 2025-01-27

Published Print: 2025-07

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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