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Optimizing Sc-Doped AlN FBARs for Wideband Performance in Sub-3 GHz RF Filters

Published Online: 2025-11-14

Published Print: 2026-02

Authors

Lin, Re-Ching https://orcid.org/0009-0006-5315-5948
Cheng, Chien-Chuan

Sun, Shih-Jye
Funding

Funding for this research was provided by:

National Science and Technology Council (NSTC 114-2221-E-035 -079)

National Science and Technology Council (NSTC 114-2112-M-390-002)
License Information

Text and Data Mining valid from 2025-11-14

Version of Record valid from 2025-11-14
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Article History

Received: 25 August 2025

Accepted: 29 October 2025

First Online: 14 November 2025

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