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Multiscale Stability Analysis of Fumed Silica Dispersions for Chemical Mechanical Polishing

Published Online: 2026-02-28

Published Print: 2026-05

Authors

Cao, Xusheng

Luo, Chong https://orcid.org/0009-0007-1661-7792
Zhu, Ziming

Fu, Shigong

Liu, Anlan
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (62074049)

Natural Science Foundation of Hebei (E2023202267)
License Information

Text and Data Mining valid from 2026-02-28

Version of Record valid from 2026-02-28
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Article History

Received: 20 November 2025

Accepted: 11 February 2026

First Online: 28 February 2026

Conflict of Interest

: The authors declare that they have no conflicts of interest.

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