Residual Stress and Surface Energy of Sputtered TiN Films
Crossref DOI link: https://doi.org/10.1007/s11665-015-1393-5
Published Online: 2015-01-21
Published Print: 2015-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Pang, Xiaolu
Zhang, Liqiang
Yang, Huisheng
Gao, Kewei
Volinsky, Alex A.
Text and Data Mining valid from 2015-01-21