Microtribological Mechanisms of Tungsten and Aluminum Nitride Films
Crossref DOI link: https://doi.org/10.1007/s11665-016-2008-5
Published Online: 2016-03-16
Published Print: 2016-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhao, Hongjian
Mu, Chunyan
Ye, Fuxing
Text and Data Mining valid from 2016-03-16
