Effect of Peak Power in Deep Oscillation Magnetron Sputtering on Film Properties
Crossref DOI link: https://doi.org/10.1007/s11665-021-05521-w
Published Online: 2021-02-16
Published Print: 2021-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ferreira, Fábio
Cavaleiro, Albano
Oliveira, João
Text and Data Mining valid from 2021-02-16
Version of Record valid from 2021-02-16
Article History
Received: 20 November 2020
Revised: 22 December 2020
Accepted: 19 January 2021
First Online: 16 February 2021