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A Modified Bosch Process of SF6/C4F8/O2 ICP-RIE Si Etching

Crossref DOI link: https://doi.org/10.1007/s11665-024-10514-6

Published Online: 2024-12-05

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Wang, Yi

Chen, Luhua

Zeng, Xiangzhe

Song, Jinhui https://orcid.org/0000-0002-0042-2014
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Text and Data Mining valid from 2024-12-05

Version of Record valid from 2024-12-05
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Article History

Received: 17 May 2024

Revised: 24 September 2024

Accepted: 29 October 2024

First Online: 5 December 2024

Conflict of interest

: The authors declare that they have no conflict of interest.