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Microscopic Mechanism for the Interfacial Diffusion in Mo/Si Multilayers from Molecular Dynamics Simulations

Published Online: 2025-08-28

Authors

Qiu, Meifeng https://orcid.org/0000-0002-9068-7779
Cui, Chuan-Xin

Li, Yu

Jiang, Jin-Wu
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Text and Data Mining valid from 2025-08-28

Version of Record valid from 2025-08-28
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Article History

Received: 1 February 2025

Revised: 10 April 2025

Accepted: 3 May 2025

First Online: 28 August 2025

Conflict of interest

: The authors declare that they have no conflict of interest.

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