Few-Shot AI Segmentation of Semiconductor Device FIB-SEM Tomography Data
Crossref DOI link: https://doi.org/10.1007/s11668-025-02203-w
Published Online: 2025-07-15
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Stegmann, Heiko
Cognigni, Flavio
Text and Data Mining valid from 2025-07-15
Version of Record valid from 2025-07-15
Article History
Received: 14 March 2025
Revised: 30 April 2025
Accepted: 20 May 2025
First Online: 15 July 2025