Steps Toward Automated Failure Analysis Using FIB-SEM 3D Tomography and AI-based Segmentation
Crossref DOI link: https://doi.org/10.1007/s11668-026-02564-w
Published Online: 2026-09-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Limbecker, Pascal
Wu, Rong
Woyack, Thomas
Stegmann, Heiko
Plencner, Daniel
Salzer, Roland
Fedotov, Dmitrii
Text and Data Mining valid from 2026-09-10
Version of Record valid from 2026-09-10
Article History
Received: 13 March 2026
Revised: 29 July 2026
Accepted: 18 August 2026
First Online: 10 September 2026