Where physics meets chemistry: Thin film deposition from reactive plasmas
Crossref DOI link: https://doi.org/10.1007/s11705-016-1598-7
Published Online: 2016-12-23
Published Print: 2016-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Michelmore, Andrew
Whittle, Jason D.
Bradley, James W.
Short, Robert D.
License valid from 2016-12-01