Effects of ratio of hydrogen flow on microstructure of hydrogenated microcrystalline silicon films deposited by magnetron sputtering at 100 °C
Crossref DOI link: https://doi.org/10.1007/s11771-019-4203-7
Published Online: 2019-11-14
Published Print: 2019-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Wang, Lin-qing
Zhou, Yong-tao
Wang, Jun-jun http://orcid.org/0000-0001-5796-8926
Liu, Xue-qin
Text and Data Mining valid from 2019-10-01
Version of Record valid from 2019-10-01
Article History
Received: 2 September 2018
Accepted: 27 February 2019
First Online: 14 November 2019