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Ultra-low temperature anodic bonding of silicon and glass based on nano-gap dielectric barrier discharge

Published Online: 2021-02-18

Published Print: 2021-02

Authors

Yao, Fu-rong

Pan, Ming-qiang https://orcid.org/0000-0002-3909-4396
Zhu, Zong-jian

Liu, Ji-zhu

Wang, Yang-jun
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Text and Data Mining valid from 2021-02-01

Version of Record valid from 2021-02-01
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Article History

Received: 13 January 2020

Accepted: 22 November 2020

First Online: 18 February 2021

Conflict of interest

: YAO Fu-rong, PAN Ming-qiang, ZHU Zong-jian, LIU Ji-zhu, WAAN Yang-jun declare that they have no conflict of interest.

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