Optical and electrical properties of room temperature prepared α-IGZO thin films using an In2Ga2ZnO7 ceramic target
Crossref DOI link: https://doi.org/10.1007/s11771-022-4978-9
Published Online: 2022-05-14
Published Print: 2022-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhang, Yu
Chen, Jie http://orcid.org/0000-0003-2290-1435
Sun, Ben-shuang
Liu, Shuai
Wang, Zhi-jun
Liu, Shu-han
Shu, Yong-chun
He, Ji-lin
Text and Data Mining valid from 2022-04-01
Version of Record valid from 2022-04-01
Article History
Received: 1 May 2021
Accepted: 22 November 2021
First Online: 14 May 2022