Effect of surface roughness on femtosecond laser ablation of 4H-SiC substrates
Crossref DOI link: https://doi.org/10.1007/s11771-022-5136-0
Published Online: 2022-11-02
Published Print: 2022-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Chen, Jian-qiang
Xie, Xiao-zhu http://orcid.org/0000-0002-9059-2235
Peng, Qing-fa
He, Zi-yu
Hu, Wei
Ren, Qing-lei
Long, Jiang-you
Text and Data Mining valid from 2022-10-01
Version of Record valid from 2022-10-01
Article History
Received: 23 February 2022
Accepted: 10 May 2022
First Online: 2 November 2022