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Femtosecond-laser direct writing 3D micro/nano-lithography using VIS-light oscillator

Crossref DOI link: https://doi.org/10.1007/s11771-022-5153-z

Published Online: 2022-11-15

Published Print: 2022-10

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Butkus, Antanas

Skliutas, Edvinas

Gailevičius, Darius

Malinauskas, Mangirdas https://orcid.org/0000-0002-6937-4284
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Text and Data Mining valid from 2022-10-01

Version of Record valid from 2022-10-01
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Article History

Received: 15 July 2022

Accepted: 9 September 2022

First Online: 15 November 2022