Effects of parameters on the performance of amorphous IGZO thin films prepared by RF magnetron sputtering
Crossref DOI link: https://doi.org/10.1007/s11801-014-4125-4
Published Online: 2014-08-30
Published Print: 2014-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Niu, Jian-wen
Ma, Rui-xin
Wang, Yuan-yuan
Li, Shi-na
Cheng, Shi-yao
Liu, Zi-lin
Text and Data Mining valid from 2014-08-30