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Study on thickness uniformity of Ta2O5 film evaporated on the inner-face of a hemispherical substrate

Crossref DOI link: https://doi.org/10.1007/s11801-021-1040-3

Published Online: 2021-12-03

Published Print: 2021-11

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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