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Plasma polymerized hexamethyldisilazane thin films in RF remote plasma system: effect of substrate distance from plasma source

Crossref DOI link: https://doi.org/10.1007/s11801-025-4162-1

Published Online: 2025-09-25

Published Print: 2025-10

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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