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MEMS-based tunable Fabry–Perot filter in near-infrared band with improved cantilever beams

Published Online: 2026-02-10

Published Print: 2026-01

Authors

Wang, Jingting

Jiang, Yufei

Wang, Yu

Zhu, Kangrui

Tao, Chuanyi
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Text and Data Mining valid from 2026-01-01

Version of Record valid from 2026-01-01
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Article History

Received: 26 July 2024

Revised: 17 May 2025

First Online: 10 February 2026

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: The authors declare no conflict of interest.

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