Exploration for the potential precursors for zirconium carbide atomic layer deposition via comprehensive computational mechanistic study of the gas phase decomposition of neopentyl zirconium derivatives
Crossref DOI link: https://doi.org/10.1007/s11814-014-0177-1
Published Online: 2014-08-23
Published Print: 2014-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Won, Yong Sun
Text and Data Mining valid from 2014-08-23
