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Heptafluoroisopropyl Methyl Ether as a Low Global Warming Potential Alternative for Plasma Etching of SiC

Published Online: 2024-03-25

Published Print: 2024-05

Authors

You, Sanghyun

Sun, Eun Jae

Hwang, Yujeong

Kim, Chang-Koo https://orcid.org/0000-0002-8119-7874
Funding

Funding for this research was provided by:

Korea Evaluation Institute of Industrial Technology (20017456)

Korea Evaluation Institute of Industrial Technology (RS-2022-00155706)

Korea Evaluation Institute of Industrial Technology (00267003)

Korea Evaluation Institute of Industrial Technology (RS-2023-00266039)
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Text and Data Mining valid from 2024-03-25

Version of Record valid from 2024-03-25
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Article History

Received: 5 February 2024

Revised: 5 February 2024

Accepted: 17 March 2024

First Online: 25 March 2024

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