A Semi-Empirical Model for Tilted-Gun Planar Magnetron Sputtering Accounting for Chimney Shadowing
Crossref DOI link: https://doi.org/10.1007/s11837-014-1234-2
Published Online: 2014-12-09
Published Print: 2015-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Bunn, J. K.
Metting, C. J.
Hattrick-Simpers, J.
Text and Data Mining valid from 2014-12-09