Review of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition
Crossref DOI link: https://doi.org/10.1007/s11837-018-3141-4
Published Online: 2018-09-24
Published Print: 2019-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Subramanian, Ashwanth
Tiwale, Nikhil
Nam, Chang-Yong http://orcid.org/0000-0002-9093-4063
Funding for this research was provided by:
U.S. Department of Energy (DE-SC0012704)
Text and Data Mining valid from 2018-09-24
Version of Record valid from 2018-09-24
Article History
Received: 6 July 2018
Accepted: 12 September 2018
First Online: 24 September 2018