Investigation of the Nanomechanical Properties of Crystalline Anatase Titanium Dioxide Films Synthesized Using Atomic Layer Deposition
Crossref DOI link: https://doi.org/10.1007/s11837-020-04347-6
Published Online: 2020-09-08
Published Print: 2021-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Mohammed, Y. S.
Zhang, K.
Lin, P.
Baumgart, H. http://orcid.org/0000-0001-8272-2151
Elmustafa, A. A. http://orcid.org/0000-0001-5865-6035
Text and Data Mining valid from 2020-09-08
Version of Record valid from 2020-09-08
Article History
Received: 24 April 2020
Accepted: 21 August 2020
First Online: 8 September 2020