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Effects of Sputtering Pressure and Target–Substrate Distance on Phase Formation and Mechanical Behavior of Magnetron-Sputtered α-Ta Coatings

Crossref DOI link: https://doi.org/10.1007/s11837-026-08290-w

Published Online: 2026-04-17

Published Print: 2026-06

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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