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Study on the influence of manufacturing tolerance of the spring beam on the sensitivity of the two-axis MEMS accelerometer

Published Online: 2024-07-14

Published Print: 2025-05

Authors

Van Cuong, Nguyen

Van Minh, Phung

Cuong, Bui Manh

Duc, Nguyen Dinh https://orcid.org/0000-0003-2656-7497
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Text and Data Mining valid from 2024-07-14

Version of Record valid from 2024-07-14
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Article History

Received: 28 May 2024

Accepted: 3 July 2024

First Online: 14 July 2024

Declarations

:

: The authors declare that they have no conflicts of interest.

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