Transformation from amorphous to nano-crystalline SiC thin films prepared by HWCVD technique without hydrogen dilution
Crossref DOI link: https://doi.org/10.1007/s12034-015-1018-5
Published Online: 2015-10-10
Published Print: 2015-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
TEHRANI, F SHARIATMADAR
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