Effect of nitrogen flow rate on the mechanical properties of CVD-deposited SiCN thin films
Crossref DOI link: https://doi.org/10.1007/s12034-019-1937-7
Published Online: 2019-08-02
Published Print: 2019-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kumar, Dhruva
Ghadai, Ranjan Kr
Das, Soham
Sharma, Ashis
Swain, Bibhu P
Text and Data Mining valid from 2019-08-02
Version of Record valid from 2019-08-02
Article History
Received: 6 February 2019
Accepted: 1 June 2019
First Online: 2 August 2019