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Effect of substrate bias on the properties of DLC films created using a combined vacuum arc

Crossref DOI link: https://doi.org/10.1007/s12034-021-02454-x

Published Online: 2021-06-08

Published Print: 2021-09

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Zavaleyev, Viktor https://orcid.org/0000-0001-9054-7082
Walkowicz, Jan

Sawczak, Mirosław

Moszyński, Dariusz

Ryl, Jacek
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Text and Data Mining valid from 2021-06-08

Version of Record valid from 2021-06-08
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Article History

Received: 3 December 2020

Accepted: 12 February 2021

First Online: 8 June 2021