A negative tone lift-off method for small metal holes using PMMA/SiO2 double layer
Crossref DOI link: https://doi.org/10.1007/s12034-021-02568-2
Published Online: 2021-10-31
Published Print: 2021-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Baek, J S
Lee, D http://orcid.org/0000-0001-9519-1425
Funding for this research was provided by:
Chungnam National University
Text and Data Mining valid from 2021-10-31
Version of Record valid from 2021-10-31
Article History
Received: 21 December 2020
Accepted: 2 August 2021
First Online: 31 October 2021