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Optimization of RF sputtering parameters for improving the optical and electrical properties of β-gallium oxide thin films

Published Online: 2023-03-28

Authors

Mandal, Pramod

Roy, Sudesna https://orcid.org/0000-0003-3129-0891
Singh, Udai P
Funding

Funding for this research was provided by:

Science and Engineering Research Board, Dept. of Science and Technology, Govt. of India (grant number EMR/2016/002927)
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Text and Data Mining valid from 2023-03-28

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Article History

Received: 25 May 2022

Accepted: 6 November 2022

First Online: 28 March 2023

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