Simulation of silicon etching in NF3 plasma reactor
Crossref DOI link: https://doi.org/10.1007/s12043-023-02579-0
Published Online: 2023-06-29
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Swami, H L http://orcid.org/0000-0001-9942-2489
Mehta, V
Kumar, Yogendra
Jariwala, Chetan
Kumar, Rajesh
Text and Data Mining valid from 2023-06-29
Version of Record valid from 2023-06-29
Article History
Received: 24 January 2022
Revised: 29 July 2022
Accepted: 24 February 2023
First Online: 29 June 2023