Silicon waveguide cantilever displacement sensor for potential application for on-chip high speed AFM
Crossref DOI link: https://doi.org/10.1007/s12200-018-0774-4
Published Online: 2018-03-23
Published Print: 2018-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Wang, Peng
Michael, Aron
Kwok, Chee Yee
Text and Data Mining valid from 2018-03-01
Article History
Received: 29 November 2017
Accepted: 17 January 2018
First Online: 23 March 2018