A Micro-Electro-Mechanical System-based bulk acoustic wave piezoelectric disk resonator for detecting z-axis rotation rate
Crossref DOI link: https://doi.org/10.1007/s12204-015-1623-x
Published Online: 2015-10-23
Published Print: 2015-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Xu, Zhong-xing
Zhang, Wei-ping
Tang, Jian
Zhang, Gong
Cheng, Yu-xiang
Chen, Wen-yuan
Guan, Ran
Text and Data Mining valid from 2015-06-01