High-Performance Single-Side Fabricated (111)-Silicon Dual-Cantilever Accelerometer with Squeeze-Film Air Damping Modulation
Crossref DOI link: https://doi.org/10.1007/s12204-021-2288-2
Published Online: 2021-03-31
Published Print: 2023-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Jiao, Ding
Ni, Zao
Wang, Jiachou
Li, Xinxin
Text and Data Mining valid from 2021-03-31
Version of Record valid from 2021-03-31
Article History
Received: 24 December 2019
Accepted: 14 July 2020
First Online: 31 March 2021