Maskless laser direct imaging lithography using a 355-nm UV light source in manufacturing of flexible fine dies
Crossref DOI link: https://doi.org/10.1007/s12206-014-1243-7
Published Online: 2015-01-15
Published Print: 2015-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ryoo, Kitaek
Kim, Minwook
Sung, Jinwoo
Kim, Kwangho
Kang, Myungchang
Text and Data Mining valid from 2015-01-01