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Fabrication process of a microstructures based on hydrogenated amorphous SiGe films for applications in MEMS devices

Crossref DOI link: https://doi.org/10.1007/s12206-015-0339-z

Published Online: 2015-04-14

Published Print: 2015-04

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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