Sandglass-type product specification management method for supporting modular design of semiconductor manufacturing equipment
Crossref DOI link: https://doi.org/10.1007/s12206-016-0434-9
Published Online: 2016-05-27
Published Print: 2016-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Cho, Daeseung
Han, Jeongho
Yang, Jeongsam
Text and Data Mining valid from 2016-05-01
