Self-dressing effect using a fixed abrasive platen for single-sided lapping of sapphire substrate
Crossref DOI link: https://doi.org/10.1007/s12206-017-1105-1
Published Online: 2017-12-17
Published Print: 2017-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Lee, Taekyung
Kim, Hyoungjae
Lee, Sangjik
Park, Chuljin
Kim, Doyeon
Jeong, Haedo
License valid from 2017-12-01