Crossmark

Development of MEMS-based thermal mass flow sensors for high sensitivity and wide flow rate range

Crossref DOI link: https://doi.org/10.1007/s12206-018-0822-4

Published Online: 2018-09-14

Published Print: 2018-09

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Kang, Woong

Choi, Hae-Man

Choi, Yong-Moon
License Information

Text and Data Mining valid from 2018-09-01
More Information

Article History

Received: 25 February 2018

Revised: 20 May 2018

Accepted: 23 May 2018

First Online: 14 September 2018