A novel inverse modeling control for piezo positioning stage
Crossref DOI link: https://doi.org/10.1007/s12206-018-1136-2
Published Online: 2018-12-20
Published Print: 2018-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Dinh, To Xuan
Luan, Nguyen Phi
Ahn, Kyoung Kwan
Text and Data Mining valid from 2018-12-01
Version of Record valid from 2018-12-01
Article History
Received: 10 January 2017
Revised: 14 February 2018
Accepted: 27 June 2018
First Online: 20 December 2018