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Alleviation of the adhesive protrusion problem at the bonding interface of free-standing microstructures

Crossref DOI link: https://doi.org/10.1007/s12206-019-0129-0

Published Online: 2019-02-26

Published Print: 2019-02

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Mao, Zebing

Yoshida, Kazuhiro

Kim, Joon-wan
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Text and Data Mining valid from 2019-02-01
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Article History

Received: 21 August 2018

Revised: 5 October 2018

Accepted: 22 October 2018

First Online: 26 February 2019