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Investigation of step structure in CMP retainer ring to improve within-wafer non-uniformity

Published Online: 2019-07-10

Published Print: 2019-07

Authors

Park, Jinwoo

Hong, Seokjun

Lee, Seungjae

Jin, Yinhua

Kim, Taesung
License Information

Text and Data Mining valid from 2019-07-01

Version of Record valid from 2019-07-01
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Article History

Received: 20 December 2018

Revised: 28 March 2019

Accepted: 9 April 2019

First Online: 10 July 2019

Document is current