Crossmark

Effect of spray nozzle position on pad temperature distribution and wafer non-uniformity

Published Online: 2019-12-18

Published Print: 2019-12

Authors

Lee, Kihun

Lee, Dasol

Jeong, Seonho

Lee, Donghwan

Jeong, Haedo
License Information

Text and Data Mining valid from 2019-12-01

Version of Record valid from 2019-12-01
More Information

Article History

Received: 8 July 2019

Revised: 5 August 2019

Accepted: 7 August 2019

First Online: 18 December 2019

Document is current