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Top-down nanofabrication approaches toward single-digit-nanometer scale structures

Published Online: 2021-02-27

Published Print: 2021-03

Authors

Oh, Dong Kyo

Jeong, Heonyeong

Kim, Joohoon

Kim, Yeseul

Kim, Inki

Ok, Jong G.

Rho, Junsuk
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Text and Data Mining valid from 2021-02-27

Version of Record valid from 2021-02-27
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Article History

Received: 21 December 2020

Revised: 21 January 2021

Accepted: 27 January 2021

First Online: 27 February 2021

Document is current