Influence of windows on the phase error of interferometric surface topography of a wafer using wavelength scanning
Crossref DOI link: https://doi.org/10.1007/s12206-023-0833-7
Published Online: 2023-09-02
Published Print: 2023-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Jeon, Jurim
Kim, Yangjin
Sugita, Naohiko
Text and Data Mining valid from 2023-09-01
Version of Record valid from 2023-09-01
Article History
Received: 25 December 2022
Revised: 20 May 2023
Accepted: 7 June 2023
First Online: 2 September 2023