Optimization study of a probe chuck for semiconductor wafers using genetic algorithm and deep reinforcement learnings
Crossref DOI link: https://doi.org/10.1007/s12206-024-0734-4
Published Online: 2024-08-02
Published Print: 2024-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Choi, Geuna
Aodu, Sheriff Abiodun
Park, Il Seouk
Text and Data Mining valid from 2024-08-01
Version of Record valid from 2024-08-01
Article History
Received: 5 October 2023
Revised: 29 March 2024
Accepted: 5 April 2024
First Online: 2 August 2024