Document is current

Any future updates will be listed below

Prediction model of aspect ratio-dependent etching rate through molecular dynamics-based data processing

Crossref DOI link: https://doi.org/10.1007/s12206-025-0224-3

Published Online: 2025-03-03

Published Print: 2025-03

Update policy: https://doi.org/10.1007/springer_crossmark_policy

About CrossMark