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Direct LED writing of submicron resist patterns: Towards the fabrication of individually-addressable InGaN submicron stripe-shaped LED arrays

Crossref DOI link: https://doi.org/10.1007/s12274-014-0545-5

Published Online: 2014-09-09

Published Print: 2014-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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